Can mom capacitors be used in nanoscale CMOS processes?

However, the MOM capacitors can be easily realized through the metal interconnections, which does not need additional fabrication masks into the process. Moreover, the capacitance density of the MOM capacitor can exceed the MIM capacitor when more metal layers are used in nanoscale CMOS processes.

What are Mim and Mom capacitors in CMOS?

Two metal-layer capacitors, MIM and MOM capacitors, are widely utilized in CMOS processes. With the parallel-plate struc-ture, the MIM capacitor is composed of two metal plates and a dielectric layer between them, as shown in Fig. 4.

Are mom capacitors suitable for analog and RF processes?

They are suitable for analog and RF processes. MOM capacitors use interdigital structures and have good capacitance density but may lack determinism and stability compared to MIM capacitors. They are used in processes that do not require high capacitance.

What is the difference between MIM capacitor and Mom capacitor?

MIM capacitors are similar to plate capacitors, offering accurate capacitance values that do not change with bias voltage. They are suitable for analog and RF processes. MOM capacitors use interdigital structures and have good capacitance density but may lack determinism and stability compared to MIM capacitors.

What is a mom capacitor?

MOM, or Metal-Organic-Metal capacitors, are typically made of a metal substrate coated with organic materials. The structure of MOM capacitors allows them to exhibit excellent capacitance stability and high frequency performance. These capacitors are often employed in RF applications where size and efficiency are critical.

What is the difference between mom and MOS capacitors?

MOM capacitors use interdigital structures and have good capacitance density but may lack determinism and stability compared to MIM capacitors. They are used in processes that do not require high capacitance. MOS capacitors are voltage-controlled capacitors used within MOSFETs.