Mems variable capacitor

Wide Range Variable Capacitance Controlled by Electrostatic MEMs

Our study describes design of wide range variable capacitor controlled by electrostatic MEMs actuator. The capacitor consist of two 1000μm 2 doped polysilicon plates, which are aligned

Optimization of a MEMS variable capacitor with high

Therefore, the study of MEMS variable capacitors that offer both high linearity and a large capacitance tuning ratio has attracted enormous interest over the past decade. One potential solution to overcome the high nonlinearity of parallel-plate capacitors is to develop capacitors with novel plate structures to replace conventional variable capacitors. Seok et al.

Mems capacitor | PPT

MEMS Capacitor • MEMS (Microelectromechanical system) • Can be a variable capacitor by changing the distance between electrodes. • Use in sensing applications as well as in RF electronics. • Use in sensing applications as well

Design and simulation of a wide-range variable MEMS capacitor

A MEMS variable capacitor owns a good capacitance ratio, high-quality factor, and linearity concerning the varactor diode (Rebeiz 2004). However, electrostatically actuated MEMS tunable capacitors need high voltages for actuation. Furthermore, the function of the electrostatic force between applied voltage and the gap is nonlinear, which

MEMS based digital variable capacitors with a high-k dielectric

MEMS based digital variable capacitors with multi-cantilevers and double-clamped beams were analyzed and designed. By applying the bias voltage between two electrodes, an increased electrostatic force pulls-in the cantilever beams one by one, realizing a digital increase in capacitance. A four-mask process was developed to fabricate these

Design a new MEMS tunable capacitors using electro-thermal

Electromechanical systems or MEMS represent a technological process to create integrated systems through combining electrical and mechanical components (Maluf and Williams 2004) tegration of switches and passive elements such as inductors with high Q, resistance and different types of capacitors, such as trench capacitors with a very high density,

The Design, Simulation, and Parametric Optimization of an RF MEMS

This study presents the design and simulation of an RF MEMS variable capacitor with a high tuning ratio and high linearity factor of capacitance–voltage response. An electrostatic torsion actuator with planar and non-planar structures is presented to obtain the high tuning ratio by avoiding the occurrence of pull-in point. In the proposed

Optimization of a MEMS variable capacitor with high

Micro-electro-mechanical system (MEMS) variable capacitors offer the possibility of making RF front-end modules reconfigurable, thus enabling them to meet space limitations by requiring fewer components and able to satisfy recent multi-band application requirements.

Contactless four-terminal MEMS variable capacitor for

The gap-closing MEMS variable capacitor could be a good candidate for this purpose as it offers large capacitance variation if the actuation voltage is higher than the pull-in voltage . However, a mechanical contact is required in order to have a high capacitance variation. Consequently, this solution suffers from a high non-adiabatic loss, which is independent of the

Optimization of a MEMS variable capacitor with high

Micro-electro-mechanical system (MEMS) variable capacitors offer the possibility of making RF front-end modules reconfigurable, thus enabling them to meet space limitations by requiring

A new MEMS based variable capacitor with wide tunability, high

Compared to semiconductor varactors, MEMS variable capacitors have the potential for an extended tuning range, higher linearity and lower loss, along with the reduction

A novel linearly tunable MEMS variable capacitor

The proposed MEMS variable capacitor consists of a single suspended plate with 608 comb ﬁngers to achieve 1.4 pF nominal capacitance as shown in ﬁgure 1. The tuning electrode is made on the glass substrate. A dc voltage applied to the tuning electrode causes an electrostatic force which moves the suspended plate closer to the glass substrate and the

Design and simulation of a variable MEMS capacitor for tunable

In this paper, an on-chip variable MEMS capacitor, with designing of new special arms that cause uniform movement, is presented for use on the HMSIW-CSRR (half mode substrate integrated waveguide-complementary split-ring resonator) to

Parallel-Plate MEMS Variable Capacitor With Superior Linearity

Abstract: An innovative and simple method is proposed to achieve ultralinear behavior in a capacitance-versus-voltage response and to obtain a large capacitance tuning

Parallel-Plate MEMS Variable Capacitor With Superior Linearity

Abstract: An innovative and simple method is proposed to achieve ultralinear behavior in a capacitance-versus-voltage response and to obtain a large capacitance tuning ratio in a parallel-plate microelectromechanical systems (MEMS) variable capacitor by moving the plate to an increasing-gap direction. By adopting a levering structure, the

The mechanical modeling of a special variable MEMS capacitor

In this paper, a special variable MEMS capacitor is offered to application in the telecommunication equipment especially SIW-based structures. The variable MEMS capacitor is designed with special serpentine arms around the membrane. By using these arms, the air damping and the stiffness of the capacitor are decreased. To evaluate the performance of the

Symmetry and asymmetry from MEMS variable capacitor by nonlinear micro

2 MEMS dual-capacitor and mathematical modeling. The MEMS variable dual-capacitive device is shown in Figure 1a. It contains a movable plate, two fixed plates, and four gold stoppers. The stoppers were designed to avoid the movable plate having impacts with fixed plates overwhelming electrostatic force. The movable plates were hanged by four

MEMS variable capacitor versus MOS variable capacitor for a

MEMS variable capacitors (varicaps) are an alternative to MOS and PN junction varicaps as a tuning element in voltage controlled oscillators. There is however no comparative data available on oscillators with a MEMS and a MOS varicap. Therefore we did a design experiment with two 5GHz oscillators in 0.35µm CMOS. The worst case phase noise over the tuning range

MEMS based digital variable capacitors with a high-k dielectric

MEMS based digital variable capacitors with multi-cantilevers and double-clamped beams were analyzed and designed. By applying the bias voltage between two

Surface micromachined RF MEMS variable capacitor

MEMS variable capacitors have the potential to replace conventional varactor diodes in many applications such as oscillators, tunable filters, and phase shifters. Thermally and piezoelectrically actuated devices provide great motion control. Very linear variable capacitors can be obtained this way, and a few have been reported

A new MEMS based variable capacitor with wide tunability, high

Compared to semiconductor varactors, MEMS variable capacitors have the potential for an extended tuning range, higher linearity and lower loss, along with the reduction in weight, size, and cost of communication systems. Among solutions to tune a capacitor, most of the published RF MEMS capacitors are using the gap variation.

Design and simulation of a wide-range variable MEMS capacitor

A MEMS variable capacitor owns a good capacitance ratio, high-quality factor, and linearity concerning the varactor diode (Rebeiz 2004). However, electrostatically actuated

The Design, Simulation, and Parametric Optimization of an RF

This study presents the design and simulation of an RF MEMS variable capacitor with a high tuning ratio and high linearity factor of capacitance–voltage response. An

Surface micromachined RF MEMS variable capacitor

MEMS variable capacitors have the potential to replace conventional varactor diodes in many applications such as oscillators, tunable filters, and phase shifters. Thermally

Wide Range Variable Capacitance Controlled by Electrostatic MEMs

Our study describes design of wide range variable capacitor controlled by electrostatic MEMs actuator. The capacitor consist of two 1000μm 2 doped polysilicon plates, which are aligned one above the other and separated by 0.5μm thick dielectric BaTiO 3 .

Variable MEMS Capacitors for Millimeter-Wave Integrated Circuit

Abstract — In this work, micromachined edge-coupled capacitors are investigated using the MetalMUMPS process. A comparison is made between serrated-edge capacitors and a straight-edge capacitor. It was found that the capacitance can be increased by 20% using a triangular corrugation without requiring an increase in layout area.

Characterization of MEMS comb capacitor | Microsystem

With the advancement of micro-electro-mechanical systems (MEMS) technologies, it is compulsory to have the sources which power the micro devices at micron scale. Due to the miniaturization, compactness, inexpensive and ease of integration with the standard process compatibility, CMOS-MEMS capacitor is characterized. There are two major parts of

Variable MEMS Capacitors for Millimeter-Wave Integrated Circuit

Abstract — In this work, micromachined edge-coupled capacitors are investigated using the MetalMUMPS process. A comparison is made between serrated-edge capacitors and a

Mems variable capacitor [PDF]

6 FAQs about [Mems variable capacitor]

What is a variable MEMS capacitor?

The variable MEMS capacitor is the best alternative to the solid-state varactors. The MEMS tunable capacitor has the advantage of lower loss, lower parasitic, low-voltage operation and potentially larger tuning range and higher linearity [ 1, 5 ]. Also, the interconnection loss and noise can be less than off-chip solid-state RF components [ 8 ].

Can a variable MEMS capacitor be used in hmsiw structures?

To avoid the problems of integration and noise, a new variable MEMS capacitor is designed to use in the HMSIW structures, for the first time. Hence, two basic and specific designs are presented and the mechanical behaviour of them is analysed and simulated using the FEM.

What is the tuning range of a MEMS variable capacitor?

According to ( 10 ), the tuning range of the basic MEMS variable capacitor is 26% while this parameter for the proposed MEMS variable capacitor is 29%. Then, the proposed MEMS capacitor is placed on the HMSIW-CSRR resonator (see Figs. 2a and b ).

What are MEMS based switches & capacitors?

The MEMS based switches (dc- and ac-modes) and capacitors are the most important components for RF applications. They have a mechanical structure that isolates the control circuit from the signal circuit, and a mechanical inertia that prevents modulation of the capacitance value by RF signal, and provides good linearity.

Do MEMS based digital variable capacitors with multi-cantilevers and double-clamped beams increase capacitance?

Conclusions MEMS based digital variable capacitors with multi-cantilevers and double-clamped beams were analyzed and designed. By applying the bias voltage between two electrodes, an increased electrostatic force pulls-in the cantilever beams one by one, realizing a digital increase in capacitance.

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